HENSOLDT supplies metrology equipment for the semiconductor industry

300th Final-Focus-Metrology unit delivered

(From left): Gert Kriening, Product Manager FFM and Andreas Hülle, Head of Optronics & Land Solutions and Managing Director of HENSOLDT Optronics with the 300th FFM unit. Photo: HENSOLDT AG

Oberkochen/Germany, 28 October 2022 –Sensor solutions provider HENSOLDT has delivered the 300th Final-Focus-Metrology (FFM) high-precision measuring device for the chip industry. Since 2012, these control systems have been produced at HENSOLDT Optronics in Oberkochen and continuously developed further. The 300th unit represents a milestone with regard to HENSOLDT's role in the civilian market.

FFM is a high-precision measuring device in the wavelength range of ten µm. Using high-speed position sensors, -energy sensors and specially developed -wavefront sensors, performance-critical process parameters of a high-energy laser, as well as shapes and positions of approx. 30µm tin droplets in a vacuum chamber are determined. Based on the data determined by the FFM, a control loop is closed and the performance and accuracy of a laser beam, which has to hit the tin droplets twice each to produce the ultraviolet (EUV) light, is optimised, thus decisively influencing the efficiency of the light generation. The FFM acts as the key optoelectronic control unit, 50,000 times every second. Without EUV light, the production of today's most powerful computer chips would not be possible.

"HENSOLDT Industrial Commercial and Space Solutions has excellent capabilities in infrared technology. Every day we work with thermal imaging technology for space applications, which is a significant basis for the development of FFM. This is why we were able to develop FFM quickly and successfully," says Andreas Hülle, Head of Optronics & Land Solutions and Managing Director of HENSOLDT Optronics. "FFM contributes significantly to our successful civil business."

Currently, the target is an EUV light output of about 400-600 W. This should be achieved in the future with the newly launched 1µm technology development at HENSOLDT. The current product "FFM S3+ Phase 2" is the latest generation of the optoelectronic control unit in series production. The light output has been significantly increased again. Development of the fourth generation is currently underway.


HENSOLDT is a leading company in the European defence industry with global reach. Based in Taufkirchen near Munich, the company develops complete sensor solutions for defence and security applications. As a technology leader, HENSOLDT drives the development of defence electronics and optronics and is continuously expanding its portfolio based on innovative approaches to data management, robotics and cyber security. With more than 6,400 employees, HENSOLDT achieved a turnover of 1.5 billion euros in 2021. HENSOLDT is listed on the Frankfurt Stock Exchange.

Press contact

Alexander Ogger
Tel.: +49 (0) 7364.9557-984

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